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GAS DISTRIB. SYSTEMS FOR HIGH PURITY GASES
5.0 purity gas distribution systems
On site welding of gas distribution tubings
HCl, HBr distribution system
SO2 distribution system
Specialty gas SiH4 distributing system
Specialty gas SiH4 distributing system
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Specialty gas delivery system (SiH4, PH3 etc.) with all welded electropolished tubing, face seal fittings and 6.0 purity purging


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