The furnace shown on the picture consists of a high temperature (1200°C) furnace with an Al₂O₃ tube reaction chamber. The tube is closed at its end with water-cooled "doors" with "O" rings serving both as vacuum and overpressure seals as well.
A two-stage rotary vacuum pump with manual valves and N₂ purge is used for pumping the reaction chamber down to 10^-3 mbar.
High purity N₂, Ar, He gases are introduced into the reaction tube with manual valves, rotameters.
A pressure gage and a capacitance manometer serve for overpressure and vacuum measurements.